Modeling aspects in optical metrology II : 15-16 June 2009, Munich, Germany 
Harald Bosse, Bernd Bodermann, Richard M. Silver, editors ; sponsored by SPIE Europe ; cooperating organizations, EOS--European Optical Society [and] WLT--Wissenschaftliche Gesellschaft Lasertechnik e.V. (Germany) 
 - Bellingham, WA  SPIE  2009 
 - 1 v. (various pagings) : ill. ; 28 cm 
<br/><br/> Includes bibliographical references and author index 
<br/><br/><label>ISBN: </label>9780819476739 
<br/><br/><label>ISSN: </label>2010459267 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits - Congresses<br/>Optical measurements - Congresses<br/>Semiconductors - Design and construction - Congresses
<br/><br/><label>Dewey Class. No.: </label>681.25 BOS