TY  - BOOK
AU  - Tomokage, Hajime
ED  - International Workshop on Beam Injection Assessment of Microstructures in Semiconductors (6th : 2000 : Fukuoka, Japan)
TI  - Beam Injection Assessment of Microstructures in Semiconductors : BIAMS 2000 : proceedings of the 6th international workshop on Beam Injection Assessment of Microstructures in Semiconductors held in Fukuoka, Japan, November 12-16, 2000
SN  - 9783908450610
SN  - 200127778
U1  - 621.38152 TOM 
PY  - 2001///
CY  - Uetikon-Zuerich, Switzerland
PB  - Scitec Publications
KW  - Semiconductors - Defects - Congresses
KW  - Semiconductors - Microscopy - Congresses
KW  - Semiconductors - Testing - Congresses
N1  - Includes bibliographical references and index
ER  -