TY - BOOK AU - Chambers, A AU - Fitch, R. K AU - Halliday B. S TI - Basic vacuum technology SN - 9780750304955 SN - 98020304 U1 - 621.55 CHA PY - 1998/// CY - Bristol PB - Institute of Physics Pub KW - Vacuum technology N1 - Includes index ER -