TY - BOOK AU - Ju, Y. Sungtaek AU - Goodson, Kenneth E TI - Microscale heat conduction in integrated circuits and their constituent films SN - 9780792385912 SN - 99037208 U1 - 621.3815 SUN PY - 1999/// CY - Dordrecht ; Boston PB - Kluwer Academic KW - Heat - Transmission KW - Semiconductors - Cooling KW - Silicon-on-insulator technology KW - Thin film transistors N1 - Includes bibliographical references ER -