TY  - BOOK
AU  - Armin, Sulzmann
TI  - Microrobotics and microsystem fabrication : 16-17 October 1997, Pittsburgh, Pennsylvania
SN  - 9780819426345
U1  - 629.892 SUL 
PY  - 1997///
CY  - Bellingham, WA
PB  - SPIE
KW  - Microelectromechanical systems
KW  - Microfabrication
ER  -