TY  - BOOK
AU  - Breguet, Jean-Marc
AU  - Nelson, Bradley J
ED  - Society of Photo-optical Instrumentation Engineers
TI  - Microrobotics and microassembly II, 5-6 November 2000
SN  - 9780819438591
SN  - 200227809
U1  - 629.892 NEL 
PY  - 2000///
CY  - Bellingham, Wash
PB  - International Society for Optical Engineering
KW  - Microelectromechanical systems - Congresses
KW  - Microfabrication - Congresses
KW  - Microrobots - Congresses
KW  - Robotics - Congresses
N1  - Includes bibliographical references and index
ER  -