TY  - BOOK
AU  - Johnson, Eric G
AU  - Nordin, Gregory P
AU  - Suleski, Thomas J
ED  - Sandia National Laboratories, Semiconductor Equipment and Materials International, Society of Photo-optical Instrumentation Engineers, Solid State Technology (Organization)
TI  - Micromachining technology for micro-optics and nano-optics III : 25-27 January 2005, San Jose, California, USA
SN  - 9780819456946
SN  - 200529601
U1  - 621.36 JON 
PY  - 2005///
CY  - Bellingham, WA
PB  - SPIE
KW  - Integrated optics - Congresses
KW  - Microelectromechanical systems - Congresses
KW  - Micromachining - Congresses
KW  - Miniature electronic equipment - Design and construction - Congresses
KW  - Optoelectronic devices - Design and construction - Congresses
KW  - Victoria and Albert Museum
N1  - First conference has title: Micromachining technology for micro-optics. Includes bibliographical references and author index
ER  -