Micromachining technology for micro-optics and nano-optics III : 25-27 January 2005, San Jose, California, USA 
Eric G. Johnson, Gregory P. Nordin, Thomas J. Suleski, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, Sandia National Laboratories (USA) 
 - Bellingham, WA  SPIE  c2005 
 - xl, 282 p. : ill. ; 28 cm 
<br/><br/> First conference has title: Micromachining technology for micro-optics. Includes bibliographical references and author index 
<br/><br/><label>ISBN: </label>9780819456946 
<br/><br/><label>ISSN: </label>2005296016 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated optics - Congresses<br/>Microelectromechanical systems - Congresses<br/>Micromachining - Congresses<br/>Miniature electronic equipment - Design and construction - Congresses<br/>Optoelectronic devices - Design and construction - Congresses<br/>Victoria and Albert Museum
<br/><br/><label>Dewey Class. No.: </label>621.36 JON