TY  - BOOK
AU  - Karam, Jean-Michel
AU  - Perez-Maher, Mary Ann
AU  - Yasaitis, John
ED  - Semiconductor Equipment and Materials International, Society of Photo-optical Instrumentation Engineers
TI  - Micromachining and microfabrication process technology VIII : 27-29 January, 2003, San Jose, California, USA
SN  - 9780819447791
SN  - 200429687
U1  - 671.35 YAS 
PY  - 2003///
CY  - Bellingham, WA
PB  - SPIE
KW  - Electromechanical devices - Design and construction - Congresses
KW  - Microfabrication - Congresses
KW  - Micromachining - Congresses
N1  - Includes bibliographical references and author index
ER  -