Micromachining and microfabrication process technology VIII : 27-29 January, 2003, San Jose, California, USA 
John A. Yasaitis, Mary Ann Perez-Maher, Jean Michel Karam, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.] 
 - Bellingham, WA  SPIE  2003 
 - ix, 604 p. : ill. ; 28 cm 
<br/><br/> Includes bibliographical references and author index 
<br/><br/><label>ISBN: </label>9780819447791 
<br/><br/><label>ISSN: </label>2004296874 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electromechanical devices - Design and construction - Congresses<br/>Microfabrication - Congresses<br/>Micromachining - Congresses
<br/><br/><label>Dewey Class. No.: </label>671.35 YAS