TY  - BOOK
AU  - Hornung, Mark R
AU  - Brand, Oliver
TI  - Micromachined ultrasound-based proximity sensors
SN  - 9780792385080
SN  - 99020175
U1  - 681.25 HOR 
PY  - 1999///
CY  - Boston
PB  - Kluwer Academic
KW  - Microelectromechanical systems
KW  - Proximity detectors
KW  - Ultrasonic transducers
N1  - Includes bibliographical references (p. [111]-118) and index
ER  -