TY  - BOOK
AU  - Paul, Oliver
AU  - Peeters, Eric
ED  - Sandia National Laboratories, Semiconductor Equipment and Materials International, Society of Photo-optical Instrumentation Engineers, Solid State Technology (Organization)
TI  - Micromachined devices and components VI : 18-19 September 2000, Santa Clara, USA
SN  - 9780819438324
SN  - 200126769
U1  - 620.5 PEE 
PY  - 2000///
CY  - Bellingham, WA
PB  - SPIE
KW  - Electromechanical devices - Congresses
KW  - Micromachining - Congresses
KW  - Micromechanics - Congresses
N1  - Includes bibliographical references and index
ER  -