Micromachined devices and components VI : 18-19 September 2000, Santa Clara, USA 
Eric Peeters, Oliver Paul, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA) 
 - Bellingham, WA  SPIE  c2000 
 - viii, 282 p. : ill. ; 28 cm 
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780819438324 
<br/><br/><label>ISSN: </label>2001267697 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electromechanical devices - Congresses<br/>Micromachining - Congresses<br/>Micromechanics - Congresses
<br/><br/><label>Dewey Class. No.: </label>620.5 PEE