TY  - BOOK
AU  - Mack, Chris A
AU  - Yuan, Xiaocong
ED  - Institute of Physics, Singapore, Nanyang Technological University, Society of Photo-optical Instrumentation Engineers
TI  - Microlithographic techniques in integrated circuit fabrication II : 28-30 November 2000, Singapore
SN  - 9780819438980
SN  - 200127753
U1  - 621.3815 MAC 
PY  - 2000///
CY  - Bellingham, WA
PB  - SPIE
KW  - Integrated circuits - Design and construction - Congresses
KW  - Integrated circuits - Inspection - Congresses
KW  - Microlithography - Industrial applications - Congresses
KW  - Process control - Congresses
N1  - Includes bibliographical references and index
ER  -