Microlithographic techniques in integrated circuit fabrication II : 28-30 November 2000, Singapore Chris A. Mack, Xiaocong Yuan, chairs/editors ; sponsored by Nanyang Technological University (Singapore) [and] SPIE--the International Society for Optical Engineering ; cooperating organizations, Institute of Physics (Singapore) ... [et al.] - Bellingham, WA SPIE 2000 - xv, 194 p. : ill. ; 28 cm

Includes bibliographical references and index

9780819438980

2001277535


Integrated circuits - Design and construction - Congresses
Integrated circuits - Inspection - Congresses
Microlithography - Industrial applications - Congresses
Process control - Congresses

621.3815 MAC