Microlithographic techniques in integrated circuit fabrication II : 28-30 November 2000, Singapore
Chris A. Mack, Xiaocong Yuan, chairs/editors ; sponsored by Nanyang Technological University (Singapore) [and] SPIE--the International Society for Optical Engineering ; cooperating organizations, Institute of Physics (Singapore) ... [et al.]
- Bellingham, WA SPIE 2000
- xv, 194 p. : ill. ; 28 cm
Includes bibliographical references and index
9780819438980
2001277535
Integrated circuits - Design and construction - Congresses Integrated circuits - Inspection - Congresses Microlithography - Industrial applications - Congresses Process control - Congresses