TY  - BOOK
AU  - Jackson, Mark J
TI  - Microfabrication and nanomanufacturing
SN  - 9780824724313
SN  - 200504927
U1  - 620.5 JAC 
PY  - 2006///
CY  - Boca Raton, FL ; New York
PB  - CRC Taylor & Francis
KW  - Integrated circuits - Design and construction
KW  - Microelectromechanical systems - Design and construction
KW  - Microelectronics
N1  - Includes bibliographical references and index
ER  -