Microfabrication and nanomanufacturing 
edited by Mark J. Jackson 
 - Boca Raton, FL ; New York  CRC Taylor & Francis  2006 
 - [xii], 401 p. : ill. ; 27 cm 
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780824724313 
<br/><br/><label>ISSN: </label>2005049275 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits - Design and construction<br/>Microelectromechanical systems - Design and construction<br/>Microelectronics
<br/><br/><label>Dewey Class. No.: </label>620.5 JAC