Casper, L. A <br/><br/>
Microelectronics processing : inorganic materials characterization 
Lawrence A. Casper 
 - Washington, DC  American Chemical Society  1986 
 - x, 443 p. : ill. ; 24 cm 
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780841209343 
<br/><br/><label>ISSN: </label>85030648 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics - Materials - Congresses
<br/><br/><label>Dewey Class. No.: </label>621.381 CAS