TY  - BOOK
AU  - Grovenor, C. R. M
TI  - Microelectronic materials
SN  - 9780852742709
SN  - 88028415
U1  - 621.381 GRO 
PY  - 1998///
CY  - New York
PB  - Taylor & Francis
KW  - Microelectronic devices - Design & manufacture
KW  - Microelectronics - Materials
N1  - Includes bibliographical references and index
ER  -