Microelectronic device technology III : 22-23 September 1999, Santa Clara, California 
David Burnett, Toshiaki Tsuchiya, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, the Electrochemical Society ... [et al.] 
 - Bellingham, WA  SPIE  c1999 
 - ix, 304 p. : ill. ; 28 cm 
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780819434784 
<br/><br/><label>ISSN: </label>2002265194 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics - Congresses<br/>Semiconductors - Congresses<br/>Semiconductors - Design and construction - Congresses
<br/><br/><label>Dewey Class. No.: </label>621.38152 BUR