TY  - BOOK
AU  - Versuh, Eve
TI  - Microelectromechanical systems
SN  - 9781632383235
U1  - 621.381 VER 
PY  - 2015///
CY  - New York
PB  - Research Press
KW  - Microelectromechanical systems
N1  - Includes bibliographical references
ER  -