TY  - BOOK
AU  - Van Zant, Peter
TI  - Microchip fabrication : a practical guide to semiconductor processing
SN  - 9780071432412
SN  - 200404028
U1  - 621.38152 ZAN 
PY  - 2004///
CY  - New York
PB  - McGraw-Hill
KW  - Integrated circuits - Design and construction
KW  - Semiconductors - Design and construction
N1  - Includes bibliographical references and index
ER  -