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Micro mechanical systems : principles and technology
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Micro mechanical systems : principles and technology
edited by T. Fukuda and W. Menz
Contributor(s):
Fukuda, T
Menz, W
Publication details:
Amsterdam
Elsevier
1998
Description:
viii, 268 p. : ill. ; 25 cm
ISBN:
9780444823632
ISSN:
98020529
Subject(s):
Microelectromechanical systems - Handbooks, manuals, etc
DDC classification:
621 FUK
Item type:
Books
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