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Micro mechanical systems : principles and technology edited by T. Fukuda and W. Menz

Contributor(s): Publication details: Amsterdam Elsevier 1998Description: viii, 268 p. : ill. ; 25 cmISBN:
  • 9780444823632
ISSN:
  • 98020529
Subject(s): DDC classification:
  • 621 FUK
Item type: Books
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