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Micro- and nanotechnology : materials, processes, packaging, and systems III : 11-13 December 2006, Adelaide, Australia Jung-Chih Chiao ... [et al.], chair/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by Australian Government Department of Defence, Defence Science and Technology Organisation (Australia) ... [et al.]

Contributor(s): Publication details: Bellingham, WA SPIE 2007Description: 1 v. (various pagings) : ill. ; 28 cmISBN:
  • 9780819465238
ISSN:
  • 2007278360
Subject(s): DDC classification:
  • 620.5 CHI
Item type: Books
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