Metal impurities in silicon-device fabrication Klaus Graff

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Publication details: Berlin Springer c2000Edition: 2nd, rev. edDescription: xv, 268 p. : ill. ; 24 cmISBN:

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621.38152 GRA (Browse shelf(Opens below))	Available		477682

Includes bibliographical references and index

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