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VLSI technology S.M.Sze

By: Publication details: New Delhi Tata McGraw Hill Education 2010Edition: 2nd edDescription: xii, 676 p. : 23 cmISBN:
  • 9780070582910
DDC classification:
  • 621.395 SZE
Item type: Books
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Contents : Chapter 1 Crystal Growth and water prepreparation Chapter 1 Crystal Growth and water prepreparation Chapter 2 Epitaxy Chapter 3 Oxidation Chapter 4 Lithography Chapter 5 Reactive Plasma Etching Chapter 6 Dielectric and Polysilicon Film Deposition Chapter 7 Diffusion Chapter 9 Metallization Chapter 10 Process Simulation Chapter 11 VLSI Process Integration Chapter 12 Analytical Techniques Chapter 13 Assembly techniques and Pavckaging of VLSI Devices Chapter 14 Yield and Reliability Appendixes Index &nbsp; </li>

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