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MEMS/MOEMS components and their applications V : special focus topics : transducers at the micro-nano interface : 21-22 January 2008, San Jose, California, USA Srinivas A. Tadigadapa, Babak A. Parviz, Albert K. Henning, editors ; sponsored by SPIE ; cosponsored by the Photonics Center at Boston University (USA)

Contributor(s): Publication details: Bellingham, WA SPIE c2008Description: 1 v. (various pagings) : ill. ; 28 cmISBN:
  • 9780819470607
ISSN:
  • 2010459242
Subject(s): DDC classification:
  • 621.381 TAD
Item type: Books
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