MEMS/MOEMS components and their applications V : special focus topics : transducers at the micro-nano interface : 21-22 January 2008, San Jose, California, USA Srinivas A. Tadigadapa, Babak A. Parviz, Albert K. Henning, editors ; sponsored by SPIE ; cosponsored by the Photonics Center at Boston University (USA)

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Publication details: Bellingham, WA SPIE c2008Description: 1 v. (various pagings) : ill. ; 28 cmISBN:

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621.381 TAD (Browse shelf(Opens below))	Available		277390

Includes bibliographical references and author index

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