MEMS/MOEMS components and their applications II : 24-25 January 2005, San Jose, California, USA Albert K. Henning, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology [and] Sandia National Laboratories (USA)

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Publication details: Bellingham, WA SPIE c2005Description: xli, 242 p. : ill. ; 28 cmISBN:

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621.381 HEN (Browse shelf(Opens below))	Available		423897

Includes bibliographical references and author index

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