MEMS/MOEMS components and their applications : 26-27 January, 2004, San Jose, California, USA Siegfried W. Janson, Albert K. Henning, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

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Publication details: Bellingham, WA SPIE c2004Description: xxxi, 232 p. : ill. ; 28 cmISBN:

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621.381 JAN (Browse shelf(Opens below))	Available		277413

Includes bibliographical references and author index

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