MEMS components and applications for industry, automobiles, aerospace, and communication : 22-23 October 2001, San Francisco, USA Henry Helvajian, Siegfried W. Janson, Franz Lärmer, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cosponsored by DARPA--Defense Advanced Research Projects Agency (USA) ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International (USA) ... [et al.]

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Publication details: Bellingham, WA SPIE 2001Description: xxvii, 190 p. : ill. ; 28 cmISBN:

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621.381 HEL (Browse shelf(Opens below))	Available		277489

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Previous	621.381 HAR Digital design and computer architecture	621.381 HAR Electronic assembly fabrication : chips, circuit boards, packages, and components	621.381 HAY Student manual for the art of electronics	621.381 HEL MEMS components and applications for industry, automobiles, aerospace, and communication : 22-23 October 2001, San Francisco, USA	621.381 HEL Laser applications in microelectronic and optoelectronic manufacturing V : 24-26 January, 2000, San Jose, USA	621.381 HEN MEMS/MOEMS components and their applications II : 24-25 January 2005, San Jose, California, USA	621.381 HER Electronics for electricians	Next

Includes bibliographical references and index

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