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MEMS and microsystems : design, manufacture, and nanoscale engineering Tai-Ran Hsu

By: Publication details: Hoboken, NJ John Wiley 2008Edition: 2nd edDescription: xxv, 550 p. : ill. ; 25 cmISBN:
  • 9780470083017
ISSN:
  • 2007017041
Subject(s): DDC classification:
  • 621.381 HSU
Item type: Books
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Includes bibliographical references (p. 509-521) and index

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