Ultraclean surface processing of silicon wafers : secrets of VLSI manufacturing Takeshi Hattori (ed.)

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Publication details: Berlin Springer 1998Description: xxviii, 616 p. : ill. ; 24 cmISBN:

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621.38152 HAT (Browse shelf(Opens below))	Available		299950

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Includes bibliographical references and index

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