Ultra clean processing of silicon surfaces V edited by Marc Heyns,Paul Mertens and Marc Meuris

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Publication details: Switzerland Scitec Publications 2003Description: xiii, 311p. ; 25 cmISBN:

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Item type: Books

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621.38152 HEY (Browse shelf(Opens below))	Available		387317

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