Ultra clean processing of semiconductor surfaces ix Paul Mertens, Marc Meuris and Marc Heyns

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Publication details: Switzerland Trans Tech 2009Description: xvi, 400 p.ill.: 25cmISBN:

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Item type: Books

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	537.622 MER (Browse shelf(Opens below))	Available		387206

Includes index

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