Tribology in chemical-mechanical planarization Hong Liang, David Craven

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Publication details: Boca Raton, FL Taylor & Francis 2005Description: 185 p. : ill. ; 25 cmISBN:

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621.92 LIA (Browse shelf(Opens below))	Available		144520

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Includes bibliographical references and index

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