The science and engineering of microelectronic fabrication Stephen A. Campbell

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Publication details: Oxford Oxford University Press 2001Edition: 2nd edDescription: xiv, 603 p. : ill. ; 24 cmISBN:

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621.38152 CAM (Browse shelf(Opens below))	Available		113870

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Previous	621.38152 BRE Introduction to semiconductor devices for computing and telecommunications applications	621.38152 BUB Photoelectronic properties of semiconductors	621.38152 BUR Microelectronic device technology III : 22-23 September 1999, Santa Clara, California	621.38152 CAM The science and engineering of microelectronic fabrication	621.38152 CAM Fabrication engineering at the micro and nanoscale	621.38152 CAP Bulk crystal growth of electronic, optical & optoelectronic materials	621.38152 CAP Liquid phase epitaxy of electronic, optical, and optoelectronic materials	Next

Includes bibliographical references and index

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