APA
Jaeger R. C., . (2002). Introduction to Microelectronic Fabrication. : Pearson.
Chicago
Jaeger Richard C, . 2002. Introduction to Microelectronic Fabrication. : Pearson.
Harvard
Jaeger R. C., . (2002). Introduction to Microelectronic Fabrication. : Pearson.
MLA
Jaeger Richard C, . Introduction to Microelectronic Fabrication. : Pearson. 2002.