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Reliability, Packaging, Testing, And Characterization Of Mems/moems Vi : 23-24 January, 2007, San Jose, California, Usa / edited by Allyson L. Hartzell, Rajeshuni Ramesham

By: Language: English Series: Proceedings of SPIE--the International Society for Optical Engineering ; v. 6463Publication details: Bellingham Spie c2007Edition: 1st edDescription: ix, (various pagings) : ill. ; 29 cmISBN:
  • 9780819465764
Subject(s): DDC classification:
  • 621.381 HAR
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