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23rd Annual Bacus Symposium On Photomask Technology : 9-12 September, 2003, Monterey, California, Usa / edited by Kurt R. Kimmel, Wolfgang Staud

By: Language: English Series: Proceedings of SPIE--the International Society for Optical Engineering ; v. 5256Publication details: Bellingham Spie c2003Edition: 1st edDescription: xix, 700 p. : ill. ; 29 cmISBN:
  • 0819451436
Subject(s): DDC classification:
  • 621.381531 KIM
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