Materials and device characterization in micromachining III : 18-19 September 2000, Santa Clara, USA Yuli Vladimirsky, Philip J. Coane, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, [and] Sandia National Laboratories (USA)

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Publication details: Bellingham, WA SPIE c2000Description: ix, 200 p. : ill. ; 28 cmISBN:

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	671.35 VLA (Browse shelf(Opens below))	Available		277376

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Previous	671.35 RUI Progress of machining technology : selected, peer reviewed papers from the 9th international conference on progress of machining technology, April 25- 28, 2009, Kunming, China, ICPMT '09	671.35 TIE Micromachining and microfabrication process technology and devices : 7-9 November 2001, Nanjing, China	671.35 VLA Materials and device characterization in micromachining II : 20-21 September 1999, Santa Clara, California	671.35 VLA Materials and device characterization in micromachining III : 18-19 September 2000, Santa Clara, USA	671.35 YAO Machining and advanced manufacturing technology X : selected, peer reviewed papers from the 10th international conference on machining and advanced manufacturing technology, November 7-9 2009, Jinan, China	671.35 YAO Advances in machining & manufacturing technology IX	671.35 YAS Micromachining and microfabrication process technology VIII : 27-29 January, 2003, San Jose, California, USA	Next

Includes bibliographical references and index

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