Materials and device characterization in micromachining II : 20-21 September 1999, Santa Clara, California Yuli Vladimirsky, Craig R. Friedrich, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology ... [et al.]

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Publication details: Bellingham, WA SPIE c1999Description: ix, 256 p. : ill. ; 28 cmISBN:

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	671.35 VLA (Browse shelf(Opens below))	Available		423961

Includes bibliographical references and index

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