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Pulsed and pulsed bias sputtering : principles and applications by Edward V. Barnat, Toh-Ming Lu

By: Contributor(s): Publication details: Boston Kluwer Academic 2003Description: x, 155 p. : ill. ; 24 cmISBN:
  • 9781402075438
ISSN:
  • 2003054987
Subject(s): DDC classification:
  • 621.38152 BAR
Item type: Books
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