Process, equipment, and materials control in integrated circuit manufacturing V : 22-23 September, 1999, Santa Clara, California Anthony J. Toprac, Kim Dang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, the Electrochemical Society ... [et al.]

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Publication details: Bellingham, WA SPIE c1999Description: vii, 310 p. : ill. ; 28 cmISBN:

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Item type: Books

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621.3815 top (Browse shelf(Opens below))	Available		278068

Includes bibliographical references and index

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