Process, equipment, and materials control in integrated circuit manufacturing IV : 22-24 September, 1998, Santa Clara, California Anthony J. Toprac, Kim Dang, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, Solid State Technology ... [et al.]

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Publication details: Bellingham, WA SPIE c1998Description: vii, 322 p. : ill. ; 28 cmISBN:

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Item type: Books

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621.3815 TOP (Browse shelf(Opens below))	Available		423497

Includes bibliographical references and index

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