Process and equipment control in microelectronic manufacturing : 19-20 may, 1999, Edinburgh, Scotland Kevin Yallup, Murali K. Narasimhan, chairs/editors

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Publication details: Bellingham, WA SPIE 1999Description: vii, 206 p. : ill. ; 28 cmISBN:

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621.381 YAL (Browse shelf(Opens below))	Available		278097

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Includes bibliographical references and index

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