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Predictive simulation of semiconductor processing : status and challenges J. Dabrowski, E.R. Weber (eds.)

By: Contributor(s): Publication details: Berlin Springer 2004Description: xvii, 490 p. : ill. (some col.) ; 24 cmISBN:
  • 9783540204817
ISSN:
  • 2004040690
Subject(s): DDC classification:
  • 621.38152 DAB
Item type: Books
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