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Sub-half-micron lithography for ULSIs edited by Katsumi Suzuki, Shinji Matsui, and Yukinori Ochiai

Contributor(s): Publication details: Cambridge Cambridge University Press 2000Description: xvii, 323 p. : ill. ; 25 cmISBN:
  • 9780521570800
Subject(s): DDC classification:
  • 621.395 SUZ
Item type: Books
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Includes bibliographical references and index

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