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Optical microlithography XXI : 26-29 February 2008, San Jose, California, USA Harry J. Levinson, Mircea V. Dusa, editors ; sponsored and published by SPIE ; cooperating organization, SEMATECH (USA)

Contributor(s): Publication details: Bellingham, WA SPIE c2008Description: 3 v. : ill. (some col. ) ; 28 cmISBN:
  • 9780819471093
ISSN:
  • 2010287642
Subject(s): DDC classification:
  • 621.381531 LEV
Item type: Books
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Includes bibliographical references and author index

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