Optical microlithography XXII : 24-27 February 2009, San Jose, California, United States Harry J. Levinson, Mircea V. Dusa, editors ; sponsored by SPIE ; cooperating organization, SEMATECH Inc. (United States)

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Publication details: Bellingham, WA SPIE c2009Description: 2 v. : ill. (some col. ) ; 28 cmISBN:

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Includes bibliographical references and author index

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